Apparently, the width of single track reduced while the scanning speed increased as shown in table 5.4. The worst single trajectory appears in the model of scanning speed 100 mm/s which of the VED is 416 J/〖mm〗^3. The VED decreases with the increasing scanning speed, as shown in figure 5.4. As the figure 5.5 shows, with the growing VED, the track width elevates from 100 μm to 255 μm, in another word, as the scanning speed increases, the track width decreases. The tendency fits the experiment data in figure 5.6.