The polymers tested in this study were synthesized at Brewer Science, Inc. The BARC formulations were made by blending polymers, crosslinkers, catalysts, and other additives. All materials are protected by patents or are covered in previous technical publications. BARC1 is a polyacrylate matrial; BARC2 is an isocyanurate material; BARC3 is polyester with isocyanurate in main chain. The formulations were coated on silicon wafers and baked at 205°C to cure the films. The resist used in this research is a commercial available polyacrylate material. The thicknesses weremeasured on Variable-angle Spectroscopic Ellipsometer (VASE), model M2000, made by J.A. Woollam Co.The etcher used in this study was an Oxford Plasmalab® 80 Plus reactive ion etching (RIE) system. All experiments described here were carried out in discharges maintained at a source power of 200 watts and a pressure of 50 mtorr. A constant gas flow rate of 50 sccm for CF4, O2, Ar, or mixtures thereof was injected in the discharge region. Wafers were mounted on the chuck, etched for 30-60 seconds. The cooling system kept the wafer temperature at 25°C.